Project B12


Topic: Non-thermal, reactive atmospheric pressure plasma jet
Project leader:   Foest, Rüdiger, Dr., Leibniz-Institut für Plasmaforschung und Technologie e.V. Greifswald
Weltmann, Klaus-Dieter, Prof. Dr., Leibniz-Institut für Plasmaforschung und Technologie e.V. Greifswald


In project B12, the spatio-temporal development of a miniaturized non-thermal atmospheric pressure plasma jet will be studied experimentally along with its chemical kinetics during plasma enhanced chemical vapour deposition from silicon-organic precursors. The main objectives include the investigation of the low-frequency discharge dynamics and the structuring of the micro discharges under laminar gas flow conditions. The microscopic plasma parameters are determined by spectroscopic methods and, in cooperation with B3, coupled to a fluid dynamic model of the film deposition.
 

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