Project B4

Topic: Micro-particles as plasma probes
Project leader:   Kersten, Holger, Prof. Dr., Institut für Experimentelle und Angewandte Physik, Uni Kiel

Systematic measurements based on laser manipulation of the probe particles in the sheath will be performed. Implementation of a dual-frequency CCP discharge will allow for a separate control of ion flux and mean ion energy in the sheath for probing with micro-particles. By probing the sheath structure the charging mechanism can be studied precisely and compared to theoretical models. The manipulation of test particles shall be investigated also in front of three-dimensional electrode structures, e.g. holes or edges, and the effect of additional plasma sources (e.g. hollow cathode, magnetron) on the particle behavior will be studied to obtain the related field patterns.

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