Project B5

Topic: Dynamics and reactivity of electronegative plasmas
Project leader:   Meichsner, Jürgen, Prof. Dr., Institut für Physik, Uni Greifswald

Electron attachment and detachment processes in electronegative plasmas such as oxygen will be investigated by Gaussian beam microwave interferometry and laser photodetachment. Their influence on plasma instabilities and discharge operation modes in continuous as well as pulsed capacitively and inductively coupled radio frequency plasmas (low/high electronegative mode, α/γ-mode, E/H-mode) will be studied. Another focus is directed on the collision detachment of negative ions in the RF-sheath and the generation of pseudo-gamma electrons.

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